A novel design of micromachined capacitive Lamb wave transducers

摘要

A new design for micromachined capacitive Lamb wave transducers (mCLWT) has been developed. The design is based on a theoretical TDK model previously developed for groove ultrasonic transducers. By the investigation of the dynamic behavior of a rectangular high aspect ratio diaphragm of the mCLWTs, the second order bending mode of the diaphragm is exploited to excite and detect Lamb wave. The new exiting mechanism can minimize the energy of the acoustic radiation at the normal direction of the diaphragm so as to provide more energy coupled into the Lamb wave in the silicon substrate. Also, the natural frequencies and mode shapes of such a mCLWT can be determined accurately from its geometry and materials used, so the TDK model provides guidance for the optimal design of mCLWTs.