Research of the impact of slanting installation error of PSD on spot position

摘要

For the problem of the impact of slanting installation of PSD used as photoelectric detector on spot position, a mathematical model of this distortion error of the spot position is established and the simulation is done. Some conclusions show that the distortion error of the spot position increases with the increasing of slanting angle of PSD surface, beam waist radius and distance between PSD and beam waist position. The effect on spot positioning precision of foregoing two can be ignored in a little range, and the last one has great effect. The distortion error model of spot position and simulative results provide an available theoretical reference for the actually engineering applications of PSD.