Method for computer-aided alignment of complex optical system

摘要

For making complex optical system meet the design requirement, such as the space camera used in remote sensing and UVX lithophotography, especially for off-axis all-reflecting optical system, alignment technology is so necessary. In this paper, a method is presented. Based on the ideas of linearity instead of non-linearity and difference quotient instead of differential quotient, a mathematical model for computer-aided alignment is proposed. This model included the characteristics of the optical system, wavefront difference of its exit pupil and its misalignment of the misaligned optical system. Then comparing self-compiled software with alignment package of CODE V, as a result, this self-compiled software is much more valid than alignment package of CODE V. For a large aperture, long focal length and off-axis three-mirror optical system, computer-aided alignment is successful. Finally, the wavefront error of the middle field is 0.094 waves RMS and the wavefront error of +0.7 field is 0.106 waves RMS and the wavefront error of -0.7 field is 0.125 waves RMS at λ=632.8nm are obtained.