Study on the Calculation and Variation Law of Elastic Coefficient about MEMS Planar Microspring

摘要

In this paper, the energy method in mechanics of materials is used to establish the analytic model of a MEMS planar microspring, the form of which is “L”. The elastic coefficient formulas of other planar microsprings can also be obtained in the same way. The results of experiment and finite element analysis (FEA) simulation validate the correctness of the elastic coefficient formula. The stiffness of two planar microsprings with same size and material are compared and the variation law in some range is illustrated in theory.