Nanometer transmission gratings for atom interferometer gyroscope applications have been fabricated by focus ion beam. The ion beam process control strategy is presented. Stress releasing by FIB cutting is successfully demonstrated to reduce the unwanted distorting in fabrication process. Combining the in-situ Pt deposition in the process, we reduced the impact of warping in comparatively long narrow gratings’ fabrication. 45 nm gratings with good uniformity are at last showed in this work.
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