OXYGEN RECOMBINATION COEFFICIENT ON CATALYTICSURFACES IN AR-O2 ICP PLASMA BY ACTINOMETRY

摘要

Atomic oxygen wall recombination coefficient atmore than 1000 degrees Centigrade and low staticpressure was estimated using actinometric method forSiC, highly catalytic and SiO2 materials. Argon, as anactinometer, is introduced in the flow, and theevolution of the intensities ratio IO/IAr of an oxygenline to an argon line is measured along the dischargezone above the surface. Estimated values are comparedwith numerical results obtained by Kurotaki whomodeled the catalysity. There is no experiment morethan 1000 degrees Centigrade at low pressure, so thatthe data is extrapolated to the Kurotaki model.Tendency of experimental value agrees qualitativelywith Kurotaki model.