INVESTIGATION OF MANUFACTURING MICRO-OPTICALELEMENTS AT HIGH SPEED AND LOW COST

摘要

An innovative parallel direct writing system based on a spatial light modulator has been proposed. And thebasic principle of parallel direct writing micro -optical elements was analyzed. The according experimental system wasconstructed by using an electronically programmable intensity modulating spatial light modulator, a projection objectivewith 20:1 magnification ratio, a two-dimensional air-bearing stage, and so on. At the same time, the profile-controlmethod for micro-optical elements was analyzed initially. Finally, the micro-optical elements with multilevel orcontinuous surface were etched in the floor by means of inductively coupled plasma etching technology. Theinvestigation shows that this novel system can fabricate micro-optical elements with sub-micron minimum feature size,and has intrinsic parallel characteristic owing to its stepper exposure mode, therefore it can improve the manufacturingspeed and precision of micro -optical elements with low cost.