THE DESIGN OF A COPLANAR PRECISION XY-STAGE

摘要

Conventional precision XY stage is composed of two stacked up linear stages, which cause inherent Abbe’and load errors in positioning. This research develops a novel structure design of the coplanar X-Y stage, whichmakes the guide planes in X- and Y- directions are of the same height. The symmetric structure is another highlight inthis design to eliminate the moving load error. As a result, the Abbe’ error will reduce to near zero and the cumulativeerror can be also reduced. This is a possible solution for nanometer positioning technology.