Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro Electro Mechanical Systems (MEMS)

摘要

The aim of this research is to evaluate the effect of the interaction between the Laser Doppler Vibrometer and the sample in the microscale. In particular the attention will be focused in the numerical and experimental evaluation of the heating effect due to the laser beam power. The consequent temperature variation will be related to the measurement results in terms of resonance frequencies and vibrational modes determination.