Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

摘要

Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.