STEAG HamaTech Resist Coater ASR5000 - tool concept and process results -

摘要

Utilizing the balance of capillary forces and adhesion, a liquid material, e.g. photo resist, can be applied to the surface of a face down mounted substrate. STEAG HamaTech's Advanced single Substrate Resist coater, ASR5000, is combining patented capillary apply technology, and a patented face-down spin process, to enable fringe free uniform coatings on rectangular substrates. CAP COAT~(~R)ing technology reduces resist consumption by a factor of at least 10 over conventional coating methods. Face down spin, provides highly uniform resist spread without risk of backside contamination. The principle equipment concept and capability is presented. Coating and bake performance is discussed for IP3600 and ZEP7000A. Coating uniformities, of smaller +-0.7% at a 4500A thick IP3600 film and smaller +-0.4% at a 3000A thick ZEP7000A resist film were achieved, respectively. The repeatability of the coating performance and the post coat bake process (PCB) are demonstrated.