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Influence Exerted on Electrochemical Deposition by Acoustic Streaming

机译:对声流电化学沉积的影响

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During the electroplating process and under particular condition, a thin gel layer forms on the cathode surface. This layer is called a barrier layer and it retards the more noble metal in electrolyte. The work presented in the paper traces the effective technique of improving diffusion of the noblest metal ions through this barrier layer by means of ultrasonic waves. Ultrasound was used to produce micro-edges, which transport an electrolyte at the wafer surface. A high-frequency single element was used to produce electrolyte oscillations. Schlichting streaming theory basically describes those micro-edges. The experiments were done for Ni-Fe plating bath based on J. Horkans. The results indicate that by controlling the acoustic intensity, it is possible to change the angular velocity of edges and thus to control the amount of liquid injected to the vicinity of a cathode. In this way, apart from simple ion diffusion, the controlled migration inside barrier layer can be accomplished and thus the inspecting of the mass of more noble metal in the plated alloy is possible.
机译:在电镀过程中,在特定条件下,在阴极表面会形成一层薄的凝胶层。该层称为阻挡层,它可阻挡电解质中的贵金属。本文提出的工作追踪了通过超声波改善最贵金属离子通过该阻挡层的扩散的有效技术。超声波用于产生微边缘,该微边缘在晶片表面传输电解质。高频单个元件用于产生电解质振荡。 Schlichting流理论基本上描述了那些微边缘。实验是基于J. Horkans的Ni-Fe电镀液进行的。结果表明,通过控制声强,可以改变边缘的角速度,从而控制注入到阴极附近的液体的量。以这种方式,除了简单的离子扩散之外,还可以实现在阻挡层内部的受控迁移,因此可以检查镀覆合金中更多贵金属的质量。

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