Micromachines acoustic sensor for monitoring electrochemical deposition

摘要

Disclosed are micromachined acoustic sensors for monitoring electrochemical deposition, methods for fabricating such sensors, and methods for in-situ monitoring of electrochemical deposition processes using such sensors. An exemplary acoustic sensor comprises a deformable silicon membrane, an encapsulated piezoelectric layer formed on the silicon membrane, and surface electrodes formed on the piezoelectric layer. The sensor and a loudspeaker may be used to calibrate an electrochemical deposition process. The acoustic response of the sensor is monitored over time with respect to plating thickness during electroplating of a sample to generate a predictive model defining the plating process. The predictive model may be used to monitor the plating thickness of other samples in real time.