OXYGEN SENSORS BASED ON Au-DOPED ZnO and Fe_2O_3 THIN FILMS

摘要

Undoped and Au-doped iron and zinc oxide thin films have been prepared by a liquid phase method (LPD) and tested as oxygen sensors. The undoped sensors operate at a temperature of 420癈. The ZnO sensor has shown the highest sensitivity at elevated O_2 concentrations. The Fe_2O_3 sensor was found to be the most sensitive at low O_2 concentrations (<100 ppm). The addition of the noble metal promoter increases the sensitivity of both films, permitting operation at lower temperatures. The results presented show that the Au-doped metal oxide sensors are most promising in terms of response, response time and stability.