Preparation and Characterization of Electrodeposited High-B_s CoNiFe Thin Films with High Resistivity and Improvement of Their Corrosion Resistance

摘要

In order to increase the resistivity of electrodeposited high-B_s CoNiFe thin film, an organic additive such as diethylenetriamine (DET) was added to the plating bath. The desirable soft magnetic CoNiFe film with higher ρ value of 95 μ Ω-cm was developed by the carbon inclusion from the new bath containing DET. The CoNiFe thin film with high p value exhibited the excellent frequency-dependence of the permeability. Although high-ρ CoNiFe thin film did not show the sufficient corrosion resistance, annealing at 250°C for one hour in vacuum led to higher anticorrosion property.