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Laser-Assisted Surface Engineering of Silicon Nitride to Minimize the Surface Defects Generated During Grinding Operation - Part I

机译:氮化硅的激光辅助表面工程,可最大程度减少研磨操作过程中产生的表面缺陷-第一部分

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Silicon Nitride (Si_3N_4), a structural ceramic, is being increasingly used for various applcaions such as bearings, rotors, valves, etc., ue to its highly useful mechanical and physical properties. To achieve the desired close tolerance and better sufface integrity for such applications, abrasive machining using diamond wheel grinding, is primarily used. Due to the extreme mechanical properties of the silicon nitride, sub-surface and surface defects like micro-cavities, micro-cracks, smeared areas and debris are formed on the ground suface of the component due to grinding. The final flexural strength of the components are jecopardized to a greater extent due these surface defects. In this research work, a novel process in developed and established to eliminate/minimize these surface defects. The process involves annealing of defects using continuous wave carbon-dioxide (CW CO)2, lambda=10.6mum) laser radiation. The laser is applied as a radiation source to selectively soften and reflow the secndary non-Si_3N_4 phase material to fill/anneal the defects present in the surface and sub-surface. Experiments were performed at three different power densities and at a constant scanning speed in air ambient. Power densities and scanning speed were selected based on the output of the model. It is found during the investigation that the laser treatment reduces the change in the surface stoichiometry. Also, the sub-surface and surface defects are minimized and the flexural strength, which is an important property for the related applications, is found to be increased after treatment. The detrimental influence fo machining defects on the mechanical failure of the sample during the fourpoint bend testing was found to be significantly reduced.
机译:氮化硅(Si_3N_4)是一种结构陶瓷,由于其非常有用的机械和物理特性,正越来越多地用于各种应用,例如轴承,转子,阀门等。为了在此类应用中获得所需的紧密公差和更好的抛光完整性,主要使用采用金刚石砂轮磨削的磨削加工。由于氮化硅的极高的机械性能,由于研磨,在零件的地面上会形成亚表面和表面缺陷,例如微腔,微裂纹,污迹区和碎屑。由于这些表面缺陷,极大地损害了部件的最终抗弯强度。在这项研究工作中,开发并建立了消除/最小化这些表面缺陷的新工艺。该工艺涉及使用连续波二氧化碳(CW CO)2(λ= 10.6mum)激光辐射对缺陷进行退火。激光被用作辐射源,以选择性地软化和回流第二非Si_3N_4相材料,以填充/退火表面和次表面中存在的缺陷。实验是在三种不同的功率密度下,以恒定的扫描速度在空气环境中进行的。根据模型的输出选择功率密度和扫描速度。在研究过程中发现,激光处理减少了表面化学计量的变化。此外,发现在处理后,次表面和表面缺陷最小化,并且弯曲强度是相关应用的重要性能,弯曲强度得以提高。弯曲强度是相关应用的重要特性。发现在四点弯曲测试期间,加工缺陷对样品的机械失效的有害影响被显着降低。

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