Research on Hybrid Device of Si Microlens Arrays with Long Focus and ER Detector Arrays

摘要

A new method, named step simulation, is proposed to fabricate refractive 128X128 element Si microlens (MLS) arrays for hybrid integration wit PtSi IR Focal Plane Arrays(FPAs). By the method. the focal length of rectangle-based multilevel Si MLS arrays is over 1 millimeter, much longer than typical focal length of MLS array fabricated by conventional binary optics Fresnel technique. Si MLS arrays and IR FPAs are coupled with infrared glue. The IR responsiveity of the gybrid device is improved significantly.