A contact free actively controlled micromotor bearingstructure of a very flat aspect ratio is presented. The systemcombines contact free suspension and rotation withsix magnetic actuators and a minimum of three inductivesensors. The principle of combined suspension and drivecould meet price, reliability and performance requirementsfor integrated micromotors in the field of opticalchoppers, gyroscopes, hard disk drives and many more.An experimental setup was manufactured with a combinationof micromachining techniques such as etching andelectroplating.
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