CHEMICAL SENSORS BASED ON TSMR_S: EFFECT OF COATING THICKNESS

摘要

In the present work the interaction of Zn-Tetraphenylporphyrins with chemically different volatile compounds are reported, in order to create Thickness-Share-Mode-Resonators (TSMRs) with optimal thickness for sensing response. Previous results showed isotherm curves typical for each chemical compound, thus demonstrating the selectivity of the used Zn-Porphyrins. However, other parameters are expected to contribute to the isotherm shape, such as the coating porosity, roughness and thickness. In this paper, the behaviour of TSMR sensors prepared with different amounts of the same coating has been investigated. Results indicate a strong correlation between sensor properties and deposition parameters opening the way to optimised sensor fabrication.