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Nonlinear MEMS Mechanism for Energy Harvesting from Mechanical Vibrations

机译:机械振动能量收集的非线性MEMS机制

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The aim of this paper is the realization of a novel bistable U-shaped micro-electro-mechanical system to efficiently harvest energy from ambient vibrations. The classical approach is based on vibrating mechanical bodies (linear systems) that allow for collecting energy through the adoption of smart materials, magnetic or electrostatic solutions. The idea pursued in this work is to consider the device vibrations biased by external vibration sources and also a double well dynamic in order to increase the harvest performances. The switching mechanism is based on a U-shaped structure that oscillates around two stable states when the stimulus is large enough to exceed the potential barrier. The device has been designed and realized performing a custom technology (BESOI) based on 15 urn c-Si wafer. Numerical simulations and preliminary measurement campaign validate the nonlinear mechanism showing that the nonlinear system exhibits a behaviour suitable to harvest energy from ambient vibrations.
机译:本文的目的是实现新型双稳态的U形微电机械系统,以从环境振动中有效地收获能量。经典方法基于振动机械体(线性系统),其允许通过采用智能材料,磁性或静电解决方案来收集能量。在这项工作中追求的想法是考虑由外部振动源偏置的设备振动,也是双重良好动态,以增加收获表现。切换机构基于U形结构,当刺激足够大以超过潜在的屏障时,围绕两个稳定状态振荡。该装置已经设计和实现了基于15个URN C-Si晶片的定制技术(BEAOI)。数值模拟和初步测量活动验证了非线性机制,显示非线性系统表现出适于从环境振动收获能量的行为。

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