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Fabrication of cold light mirror of film projector by direct electron-beam-evaporated TiO2 and SiO2 starting materials in neutral oxygen atmosphere

机译:通过直接电子束蒸发的TiO2和SiO2在中性氧气气氛中的制造薄膜投影仪的制造

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摘要

This paper introduces a process suitable to applied production of a cold light mirror of a film projector on a large scale. Deposition parameters required for producing a TiO$-2$//SiO$-2$/ optical multilayer systems by electron beam evaporation of TiO$-2$/ and SiO$-2$/ starting materials are investigated. Manufacture and techniques of a cold mirror and the adhesion, stability, wear, and corrosion resistance of a cold mirror by this process are discussed. The results show that cold mirrors have good optical properties and better adhesion.
机译:本文介绍了一种适用于在大规模上应用薄膜投影仪的冷镜的生产的过程。通过电子束蒸发产生TiO $-$ // SiO $ -2 $ /光学多层系统所需的沉积参数通过Tio $-$ /和SiO $ -2 $ /起始材料进行了调查。讨论了冷镜的制造和技术以及通过该过程的冷镜的粘附,稳定性,磨损和耐腐蚀性。结果表明,冷镜具有良好的光学性质和更好的粘合性。

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