Compact laser vibrometer for industrial and medical a

摘要

Abstract: Laser interferometric vibrometers are now well known and accepted as sensitive, accurate, high bandwidth and linear measurement system. For many applications the internal complexity and resultant size of the interferometric sensor head limits the widespread use. This paper describes the performance and principle of operation of a new miniaturized interferometric sensor head which retains the important characteristics of the previously mentioned systems, but embodied in a robust compact housing no larger thana typical torchlight. Velocity resolution in the acoustic range has been found to be up to 50 nanometers/sec in a 10 Hz RBW. The size of this new sensor head allows it to be mounted on balanced microscope assemblies or within machinery, and the waterproof design allows disinfectant cleaning in clinical applications or operation in industrial environments. !5