High quality SrTiO_3/YBa_2Cu_3O_(7-x) Bi-layer growth for electric field effect devices

摘要

We evaluated oxygen distribution in SrTiO_3/YBa_2Cu_3O_(7-x) (STO/YBCO) bi-layers by measuring Tc values. High quality STO/YBCO bi-layers were obtained by depositing ultra-thin YBCO films with clean surfaces by molecular beam epitaxcy (MBE) and sequentially depositing STO films by pulsed laser deposition (PLD). The Tc of superconducting field effect transistor (SuFET) consisting of Ag(100mm)/STO(405mm)/YBCO(5mm) structure was 49.7K and the transconductance was 2.5mS/cm(+)and 5mS/cm(-).