Measurements of droplet formation in withdrawing electronic specialty gases from liqukfied sources

摘要

Droplet formation occurs as the electronic specialty gas is withdrawn from a liquefied source at high flow rates and/or for a long duration. These droplets can have detrimental effects on the gas delivery systems and on the semiconductor manufacturing processes. The mechanisms of droplet formation are identified as condensation due to supersaturation, which results in stable droplets in the head space of the cylinder, and nucleate boiling, which can cause continuous deoplet formation during the gas withdrawal from the cylinder. Implications are discussed and operation parameters that minimize droplet formation are described.