NUMERICAL STUDY ON THE PERFORMANCE OF A VALVELESS MICROPUMP

摘要

A valveless micropump based on electromagnetic actuation is numerically described. The pump is formed on one planar layer consisting of two inlet channels, a pump chamber, and an outlet channel whose depths are 0.3mm. The PDMS membrane enclosed on the top of the pump chamber can be periodically actuated by an electromagnetic actuator. So, it generates blowing and suction flows successively along a connecting channel which connects the inlet and outlet channels to the pump chamber. The obtained results show that the flow rate of the pump increases linearly with increasing amplitude of the vibrating plate. The pumping rates on order of 1mL/min were attained. Pump pressure is several 100Pa. The pump also shows that it can work as an efficient micromixer.