Valveless micropump with improved dosing accuracy

摘要

The micropump with a small housing size comprises a pump chamber (21) which can be filled or emptied fluidically by means of a through opening (4) and access (51), and is covered by an actuator (11; 11 ') , so that its volume can be changed by deflecting the actuator (11; 11 '), the through opening (4) being arranged in a side (61) of the pump chamber (21) opposite the actuator (11; 11'), and the access (51) has a smaller or similar flow resistance in comparison to the through opening (4), and the micropump has a second pump chamber (22) with an actuator (12; 12 ') and access (52), the through opening (4) of which The first pump chamber (21) is connected. An entrance (31) to the passage opening (4) can be closed by means of the deflected actuator (11, 12), or closed by means of the undeflected actuator (11 ', 12'). The actuator (11, 12 ; 11 ', 12') A stop (61 ', 62', 61 '', 62 '') is assigned, which stops the actuator (11, 12; 11 ', 12') mechanically limited.