Planar MSM-modulators and photodetectors with integrated Fabry-Perot resonator for arrayed configurations in high-bandwidth optical interconnects

摘要

Abstract: Surface operating metal-semiconductor-metal (MSM) modulators and photodetectors with monolithically integrated Fabry-Perot resonators are presented. Because of the planar design and the process compatibility with MESFETs, these devices are well suited for integration with electronic circuits and arrayed configurations in optical interconnects. At a switching voltage of 10 V the modulator's switching contrast exceeds 60:1 at an insertion loss of 3 dB. Up to 20 GHz a flat frequency response for photodetection and modulation is derived. !6