The ADEQUAT project for development and transfer of 0.25 ¿m logic CMOS modules

摘要

The ADEQUAT project (Advanced Developments for QUArter micron CMOS Technologies) aims at developing new device structures and process modules for the 0.25 ¿m CMOS logic generation offering improved performance with acceptable reliability while still meeting the manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organisation roadmap.