APPLICATION OF MAINSTREAM CAD/CAE TOOLS FOR MEMS

摘要

As more MEMS-based products are commercialized, there is a growing array of choices for design and analysis software. Increasingly, mainstream computer-aided design (CAD) and computer-aided engineering (CAE) tools deliver the robust capabilities previously available only with specialized, often expensive, MEMS-focused options. Given the technical and business advantages of mainstream software for some MEMS applications, serious consideration can be given to adding them to the MEMS designer's and analyst's toolbox. This paper illustrates some of the considerations in choosing a MEMS CAD/CAE tool, and provides some real applications of mainstream tools successfully used in MEMS design and analysis.