The contrast in energy filtered transmission electron microscopy (EFTEM) compositional maps is ideally suited to the reconstruction of the 3D elemental distribution of crystalline specimens using electron tomography. This paper presents two examples of such 3D-EFTEM. It is found that the signal-to-noise ratio (SNR) is an important limiting factor to the technique and that there are significant problems to avoid during acquisition. With adequate consideration of these problems however 3D-EFTEM is shown to be a viable and potentially very powerful technique for 3D chemical mapping.
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