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Surface Acoustic Wave Resonator Pressure Sensor

机译:表面声波谐振器压力传感器

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摘要

A new type of SAW (Surface Acoustic Wave) resonator pressure sensor is introduced in this paper. Firstly, the working principle of the SAW resonator is given and the daul-resonator beat-frequency method used in this principle is analyzed in detail. Then, employing this method, the temperature compensation is implemented and the sensitivity of such sensor is improved. Finally, the measured results are presented. surface acoustic wave; resonator; resonator pressure sensor
机译:本文介绍了一种新型的锯(表面声波)谐振器压力传感器。首先,给出了SAW谐振器的工作原理,并详细分析了本原理中使用的Daul-谐振器节拍频率方法。然后,采用该方法,实现了温度补偿,提高了这种传感器的灵敏度。最后,提出了测量结果。表面声波;谐振器;谐振器压力传感器

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