An on-chip buck converter which is implemented by stacking chips and which is suitable for on-chip distributed power supply systems is proposed and the operation is experimentally verified for the first time. The manufactured converter achieves the maximum power efficiency of 62% for an output current of 70mA with a switching frequency of 200MHz with a 2脳2mm on-chip LC output filter. The active part and the passive LC output filter are implemented on separate chips fabricated in 0.35-驴m CMOS and connected with metal bumps. The optimization and improvement of the power efficiency and implementation structure are also discussed.
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