Effects of the Sol-concentration on the Structural and Dielectric Properties of Pb0.3Sr0.7TiO3 Thin Films derived by Sol-gel Method

摘要

Pb0.3Sr0.7TiO3(PST) thin films were deposited on Pt coated Si(100) substrates by sol-gel techniques using different sol-concentrations. The structural and dielectric characteristics of PST thin films as a function of the sol-concentration were investigated. PST thin films reveal a columnar texture through the thickness when the sol-concentration is lower than 0.3M. PST thin films derived from 0.35 M sol show better dielectric characteristics with the dielectric constant, dielectric loss, tunability and FOM of 206, 0.01009, 47.5% and 47.07, respectively. The temperature dependence of the dielectric constant, dielectric loss and tunability of PST thin films were investigated in the temperature range of -140~120驴 驴 exhibiting a dielectric peak of around -45驴 驴.