MIMO integral-action anti-windup controller design and applications to temperature control in RTP systems

摘要

An integral-action controller synthesis is presented, where the controller achieves closed-loop stability and zero steady-state error due to step-input references. Closed-loop stability is maintained even when the integrators in all of the controller channels are limited or completely switched off to protect against integrator windup. The proposed method is applied to temperature control in rapid thermal processing systems, where critical requirements are imposed on tracking of temperature profiles.