A CMOS-Based Capacitive Sensor for Laboratory-On-Chips: Design and Experimental Results

摘要

In this paper, we present a charge-based interface circuit to detect minute capacitance changes for laboratory-on-chip applications. The interface circuits and sensing electrodes are implemented in 0.18 mum CMOS process. We describe the circuit design and then put forward simulation results. We also demonstrate and discuss the measurement results of fabricated capacitive sensor. These measurements reveal a high precision detection of sensing capacitance as less as 1 fF.