silicon; elemental semiconductors; CMOS integrated circuits; thermal conductivity; thermal resistance; humidity sensors; temperature sensors; p-n junctions; etching; electrical resistivity; thermal conductivity; humidity sensor; standard CMOS process; p-n junction diodes; air; water vapor; thermal isolation; silicon etching process; thermal resistance; electrical resistance; polysilicon; thermally isolated diodes; thermal conductance; electrochemical etch; electrical connections; temperature sensitivity; hysteresis; 5 V; 1.38 mW; 20 C; 30 C; 40 C; 0.6 micron; Si;
机译:基于标准CMOS IC工艺的MWCNTs / SiO_2薄膜湿度传感器的单芯片集成
机译:无需后处理的标准CMOS湿度传感器
机译:基于像素点分离的标准CMOS工艺的电流模式CMOS图像传感器的设计
机译:一种标准CMOS工艺中的热电导率湿度传感器
机译:使用标准CMOS工艺的化学传感器设计。
机译:无需后处理的标准CMOS湿度传感器
机译:无需后处理的标准CMOS湿度传感器