A new full-wave hybrid differential-integral approach for the investigation of multilayer structures including nonuniformly doped diffusions

摘要

A new hybrid integral-differential approach is presented for fullwave investigations of multilayer structures including nonuniformly doped diffusions. The proposed approach allow an accurate prediction of substrate noise mechanisms in combining the advantages of both the integral (homogeneous parts) and differential (inhomogeneous parts) approaches. Realistic test structures are investigated and the obtained results are successfully compared to published measurements and commercial software results. Original isolation strategies using oxide trench and isolated pockets diffused around sensitive blocks are proposed and demonstrate high isolation capabilities for epitaxial technologies.