Build-up technology of a new ultrapure water supplying system

摘要

We have consumed a month for build-up time of a new supplying system of ultrapure water (UPW), which has been used for wafer cleaning. The reason for this is that a build-up time for the number of particles in UPW would be slow. Therefore, alkaline water cleaning was applied to a new UPW supplying system before H/sub 2/O/sub 2/ cleaning for sterilization, so that build-up time for the new UPW supplying system could be cut down to 1/3 compared to that for a conventional UPW supplying system.