Numerical analysis of coplanar-lines of arbitrary structure and its application to micro-probe design for MMIC on-wafer measurement

摘要

A moment solution procedure of combined electric potential and bounded-charge integral equation system is presented for the analysis of TEM-wave transmission lines of general form. As an application example of the general procedure, a computer program is developed to precisely predict the circuit parameters of the coplanar-lines of special structure, which make up the micro-probes for MMIC on-wafer measurement. While these micro-probes have been widely tested and applied, we have not seen that any quantitative analysis and design of the micro-probes has been published.