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Excimer-laser activation of dopants in silicon - a high-energy excimer laser source for a single shot and uniform treatment over a whole die area

机译：硅中掺杂物的准分子激光活化-一种高能准分子激光源，可在整个芯片区域上进行单次喷射和均匀处理

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《》|2001年|P.146-147|共2页
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Prat; C.; Zaliorski; D.; Stehlk; M.;
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中图分类无线电电子学、电信技术;
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1. Pulsed KrF excimer laser dopant activation in nanocrystal silicon in a silicon dioxide matrix [J] . Tian Zhang, Brian Simonds, Keita Nomoto, Applied Physics Letters . 2016,第8期

机译：二氧化硅基质中纳米晶硅中的脉冲KrF受激准分子激光掺杂剂活化
2. Electrochemical And Raman-scattering Characterizations Of Defectsin Polycrystalline Silicon Thin Films Formed By Excimer-laser Annealing,rnsolid-phase Crystallization, And Continuous-wave Laser Lateral Crystallization [J] . Kuninori Kitahara, Yasutaka Ohashi, Kenichi Yamamoto, Japanese journal of applied physics . 2009,第2期

机译：准分子激光退火，固相结晶和连续波激光横向结晶形成的多晶硅薄膜缺陷的电化学和拉曼散射表征
3. Effect of Pulse Number on Dopant Activation in Silicon during Shallow p+ Junction Formation by Non-Melt Excimer Laser Annealing [J] . SitiRahmah Aid1a, Azura Hamzah1b, Sumiaty Ambran1c, MATEC Web of Conferences . 2015,第2015期

机译：非熔融准分子激光退火在浅p + / n结形成过程中脉冲数对硅中掺杂物活化的影响
4. Excimer-laser activation of dopants in silicon : a high-energy excimer laser source for a single shot and uniform treatment over a whole die area [C] . Prat, C., Zahorski, . 2001

机译：硅中掺杂物的准分子激光活化：一种高能准分子激光源，可在整个芯片区域上进行单次喷射和均匀处理
5. 2-D Melting in Excimer-Laser Irradiated Polycrystalline Silicon Films [D] . Wong, Vernon Keith. 2021

机译：在准分子激光照射多晶硅膜中的2-D熔化
6. Appropriate scrutiny of excimer-laser eye surgery. [O] . S Arshinoff 1996

机译：对准分子激光眼科手术进行适当的检查。
7. Single-Grain Si TFTs Fabricated by Liquid-Si and Long-Pulse Excimer-Laser [O] . Ishihara, R., Zhang, J., Trifunovic, M., 2012

机译：液硅和长脉冲准分子激光制造的单晶硅TFT
8. Formation of Crystalline-Silicon Islands for Thin-Film Transistors by Excimer-Laser Induced Lateral Growth. [R] . van der Wilt, P. C. 2003

机译：用准分子激光诱导侧向生长形成薄膜晶体管的晶硅岛。

Excimer-laser activation of dopants in silicon - a high-energy excimer laser source for a single shot and uniform treatment over a whole die area

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