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Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition

机译：气体团簇离子束辅助沉积形成的硬质DLC膜的特性

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DLC films formed by gas cluster ion beam (GCIB) assisted deposition were investigated by NEXAFS using synchrotron radiation.

机译：通过NEXAFS使用同步加速器辐射研究了由气体团簇离子束（GCIB）辅助沉积形成的DLC膜。

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《》|2001年|P.112-113|共2页
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Kanda; K.; Kitagawa; T.; Shimizugawa; Y.;
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中图分类无线电电子学、电信技术;
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1. Hard DLC film formation by gas cluster ion beam assisted deposition [J] . Kitagawa T., Yamada I., Toyoda N., Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2003,第2期

机译：气体团簇离子束辅助沉积形成硬质DLC膜
2. NEXAFS study on substrate temperature dependence of DLC films formed by Ar cluster ion beam assisted deposition [J] . K. Kanda, Y. Shimizugawa, Y. Haruyama, Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms . 2003,第May期

机译：NEXAFS研究Ar簇离子束辅助沉积形成DLC膜的衬底温度依赖性
3. X-ray Photoelectron Spectroscopy Study of Diamond-Like Carbon Thin Films Formed by Ar Gas Cluster Ion Beam-Assisted Fullerene Deposition [J] . Yuichi Haruyama, Teruyuki Kitagawa, Kazuhiro Kanda, Japanese journal of applied physics . 2008,第5issue1期

机译：Ar气团簇离子束辅助富勒烯沉积形成类金刚石薄膜的X射线光电子能谱研究
4. Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition [C] . Kazuhiro Kanda, Teruyuki Kitagawa, Yutaka Shimizugawa, International Microprocesses and Nanotechnology Conference . 2001

机译：气体簇离子束辅助沉积形成硬DLC膜的特性
5. IONIZED CLUSTER BEAM TECHNIQUES: Formation of Cluster Beams by Vaporized Solid Materials and Their Applications to Film Depositions [D] . Usui, Hiroaki 1988

机译：电离簇束技术：汽化固体材料形成束流束及其在膜沉积中的应用
6. Ion Beam Assisted Deposition of Thin Epitaxial GaN Films [O] . Bernd Rauschenbach, Andriy Lotnyk, Lena Neumann, 2017

机译：离子束辅助沉积外延GaN薄膜
7. Deposition of diamond like carbon (DLC) and C-N films using ion beam assisted deposition (IBAD) technique and evaluation of their properties [O] . J Prabhjyot Pal, S C Patil, S B Ogale, 1994

机译：使用离子束辅助沉积（IBAD）技术及其性质的评估，沉积金刚石（DLC）和C-N薄膜
8. Formation of aluminum films on silicon by ion beam deposition: A comparison with ionized cluster beam deposition [R] . Zuhr, R. A., Haynes, T. E., Galloway, M. D., 1990

机译：离子束沉积在硅上形成铝膜：与电离团簇束沉积的比较

Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition

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