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Diamond-like photonic crystals by holographic lithography

机译:全息光刻法形成类金刚石光子晶体

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Summary form only given. Holographic lithography is a general and flexible technique for the fabrication of three-dimensional photonic crystals. Three-dimensional microstructure is generated when a four-beam laser interference pattern is used to expose a thick layer of photoresist. Highly exposed regions in the resulting three-dimensional intensity grating are rendered insoluble; unexposed areas are then dissolved away to produce a three-dimensional photonic crystal formed of cross-linked polymer with air-filled voids. The polymeric structure may be used as a template for the production of photonic crystals with higher refractive index contrast. This technique is particularly well adapted to the production of structures with the sub-micron periodicity required for applications in the visible optical spectrum.
机译:仅提供摘要表格。全息光刻是制造三维光子晶体的通用且灵活的技术。当使用四光束激光干涉图案曝光厚的光致抗蚀剂层时,将生成三维微观结构。最终的三维强度光栅中高度暴露的区域变得不溶;然后将未曝光的区域溶解掉,以产生由具有空气填充空隙的交联聚合物形成的三维光子晶体。该聚合物结构可以用作生产具有更高折射率对比度的光子晶体的模板。该技术特别适合于生产具有可见光谱应用所需的亚微米周期性的结构。

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