In this paper we report the fabrication and testing of a low voltage force-balanced surface micromachined pressure sensor with a hermetically sealed servomechanism. In this device, the force and deformation of a diaphragm induced by an external pressure is balanced using electrostatic forces. The design described here has a full scale pressure range of 1 atmosphere, a nominal capacitance of 2.12 pF and a full scale range of 100 fF. The pressure is balanced by voltages in the range of about 12 volts, which proves the feasibility of developing a closed-loop pressure sensor using low-voltage electronics.
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