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Constant time interval production planning with application to WIP control in semiconductor fabrication

机译:恒定时间间隔生产计划及其在半导体制造中在制品控制的应用

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We develop a constant time interval production planning and control methodology, called CONSTIN, and its associated simulation system for a large-scale and unstable semiconductor manufacturing process. CONSTIN moves work-in-process inventories (WIP) between processes only at a constant time interval, and consequently maintains a desirable level of WIP. Our theoretical and experimental analysis shows a clear relationship between WIP levels and the time interval in CONSTIN. Computational experiments with realistic wafer fabrication process data demonstrate that CONSTIN is comparable in simulation accuracy to a popular event-driven simulator and can run much faster. Additional experiments also manifest that, with appropriate control rules, CONSTIN can restore the desired levels of WIP from extreme deviations and maintain them. Therefore, we conclude that CONSTIN is a promising methodology of production planning and WIP control for the semiconductor manufacturing process.
机译:我们针对大型且不稳定的半导体制造工艺开发了恒定时间间隔的生产计划和控制方法,称为CON​​STIN,及其相关的仿真系统。 CONSTIN仅以固定的时间间隔在各个流程之间移动在制品库存(WIP),因此保持了所需的WIP水平。我们的理论和实验分析表明,在制品水平与CONSTIN中的时间间隔之间存在明确的关系。使用实际晶圆制造过程数据进行的计算实验表明,CONSTIN的仿真精度可与流行的事件驱动模拟器相媲美,并且运行速度更快。其他实验还表明,使用适当的控制规则,CONSTIN可以从极端偏差中恢复所需的WIP水平并进行维护。因此,我们得出结论,CONSTIN是一种有前途的生产计划和针对半导体制造过程的WIP控制方法。

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