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An interactive program for determining junction depths in diffused silicon devices

机译:用于确定扩散硅器件中结深度的交互式程序

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An interactive program, based on the classical theory of Irvin, has been developed for predicting the junction depth in diffused p-n junctions in silicon. Students are able to vary the input parameters (surface concentration, sheet resistivity, and background concentration) of the problem and junction depth versus various processing parameters is displayed. Supporting information, such as the concentration versus depth profiles of the dopant and the concentration dependence of the dopant mobility, are also available. Our program is based on technology developed for a much broader class of interactive problems similar to the one described here. The underlying computational package is written in Java. The graphical user interface used is dynamically constructed by parsing a file containing a specified set of XML tags we call XPDL (extensible problem descriptor language), thus making it easy for those with experience writing web pages in HTML to make the transition into modifying the present application or to writing new applications.
机译:已经开发了一个基于Irvin经典理论的交互式程序,用于预测硅中扩散的p-n结中的结深。学生可以改变问题的输入参数(表面浓度,薄层电阻率和背景浓度),并显示结深与各种处理参数的关系。还可以提供支持信息,例如掺杂剂的浓度与深度分布以及掺杂剂迁移率的浓度依赖性。我们的程序基于针对广泛交互问题的技术开发,类似于此处所述。底层的计算包是用Java编写的。通过解析包含指定的XML标签集(我们称为XPDL)(可扩展的问题描述符语言)的文件来动态构建所使用的图形用户界面,从而使那些有使用HTML编写网页经验的人可以轻松地过渡到修改当前版本应用程序或编写新的应用程序。

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