Widely tunable Fabry-Perot filter using Ga(Al)As/AlO/sub x/ deformable mirrors

摘要

Microelectromechanical filters with FWHM linewidth of 0.47 nm and over 70-nm tuning was demonstrated with >1 dB insertion loss. The filters maintain their characteristics throughout the tuning range. Furthermore, the high frequency operation of such filters was established. The 3 dB cutoff frequency of 500 kHz was recorded.