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Elastic surface wave devices based on piezoelectric thick films

机译:基于压电厚膜的弹性表面波装置

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A study has been performed for the development of elastic-wave structures, involving screen printed and fired piezoelectric layers on non-piezoelectric substrates, intended for new families of thick film sensors. This study considers electroacoustic effects, i.e. the coupling between the electromechanical parameters of the layers and the elastic properties of the substrate, related to wave propagation. In this work particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and anti-symmetric) Lamb waves are generated. The realisation processes and the performance characteristics of these structures are presented.
机译:已经针对弹性波结构的开发进行了一项研究,涉及在非压电基板上丝网印刷和烧结的压电层,旨在用于新系列的厚膜传感器。这项研究考虑了电声效应,即与波传播有关的层的机电参数与基底的弹性特性之间的耦合。在这项工作中,特别注意在产生SAW以及(对称和反对称)兰姆波的氧化铝基板上实现的设备。介绍了这些结构的实现过程和性能特征。

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