Microelectronics manufacturing science technology: A university/government/industry cooperative success story

摘要

The microelectronics manufacturing science technology (MMST) program was initiated to enable cost-effective production of military integrated circuits in small volume. These circuits include both state-of-the-art integrated circuits, as well as obsolete parts no longer being manufactured. Commercial needs for fast-turn prototypes, low volume application specific integrated circuits (ASICs) and devices produced on large substrates also benefit from this approach. Many of these concepts of single-wafer modular processing, model-based process control, automated diagnostics, and computer integrated manufacturing (CIM) evolved from innovations by academia which industry is implementing to create new business opportunities in world markets.