The extremely high measurement sensitivity and accuracy has made scanning probe microscopy a valuable tool for detecting various kinds of tip surface interactions such as Van der Waals force for AFM, electron tunneling for STM, electric magnetic forces for EFM/MFM, frictional force for LFM, etc. This paper presents a enw technique, SPM nano-indentation technique, for monitoring the repulsive forcebetween the sharp probe nad material surfaceas a means to detect the mechanical properties of materials. The key advantages of SPM nano-indentation are its imaging capability which allows accurate measurement of indentation teometry and precise location of indentation probe for nanomechanical measurement. This particular study explores the areas of applicability fo SPM for measuring mechanical propertics such as young's modulus of materials. Limit studies have been done in understandignthe reproducibility of force curves, the effectof surface roughness on force curve, substrate on Young's modulus measurement, etc. Examples of Young's modulus extraction for organic films will be presented.
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