Abstract: We present the results of an experiment to demonstrate high average power uv radiation at 266 and 213 nm obtained from the fourth and fifth harmonics of a Nd:YAG laser. The second harmonic of the infrared laser was generated in an LBO (lithium triborate) crystal, the fourth harmonic by doubling the output of the LBO in a BBO (beta barium borate) crystal, and the fifth harmonic was obtained by sum frequency mixing of the fourth harmonic and the fundamental beam in another BBO crystal. In this paper we report high average power uv radiation at 266 nm (1.3 W) and at 213 nm (0.54 W). To our knowledge, these are the highest powers ever achieved at these wavelengths in an AO Q-switched, Gaussian single-mode Nd:YAG system.!5
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